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EE 423. Micro/Nano Fabrication. 3 units

Term Typically Offered: W

Prerequisite: BMED 212 or MATE 210.

Fabrication science and technology for creating micro and nano scale devices. Explore basic processes such as oxidation, diffusion, ion implantation, etching, chemical and physical vapor deposition, photolithography. Develop an understanding of the science of each process and how to select the right steps for fabricating electronic, photon and micro-electro-mechanical systems devices. 3 lectures. Crosslisted as BMED 434/EE 423/MATE 430.

Updates to the Catalog

...series EE 460 , EE 461 and EE 462...from " ME 423 " to " ME 423 or ME...